PROBE DEVICE AND PROBE MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To simply and appropriately determine a positional relationship between a plurality of terminals of a probe and an object to be measured.

SOLUTION: A probe device 10 comprises: a probe 11 including a plurality of terminals; a holding section 12 which holds the probe 11; and an irradiation section 13 which is provided on the holding section 12 and irradiates the probe 11 with light 13a, and further comprises an acquisition section 14 which acquires an image including shadows of the plurality of the terminals of the probe 11 projected onto an object 20 to be measured with the light 13a emitted from the irradiation section 13. A positional relationship between each of the terminals of the probe 11 and the object 20 to be measured is determined from the image acquired in the acquisition section 14.

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