发明名称 |
METHOD OF FABRICATING PIEZOELECTRIC MATERIALS WITH OPPOSITE C-AXIS ORIENTATIONS |
摘要 |
In accordance with a representative embodiment, a method, comprises: providing a substrate; forming a first piezoelectric layer having a compression-negative (CN) polarity over the substrate; and forming a second piezoelectric layer having a compression-positive (CP) over the substrate and adjacent to the first piezoelectric layer.
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申请公布号 |
US2012177816(A1) |
申请公布日期 |
2012.07.12 |
申请号 |
US201213428474 |
申请日期 |
2012.03.23 |
申请人 |
LARSON, III JOHN D.;KAITILA JYRKI;BADER STEFAN;AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE. LTD. |
发明人 |
LARSON, III JOHN D.;KAITILA JYRKI;BADER STEFAN |
分类号 |
H01L41/22 |
主分类号 |
H01L41/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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