CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING DETECTED SIGNAL THEREOF

摘要

This charged particle beam device is provided with: a signal processing function for acquiring a secondary signal obtained when a charged particle beam is scanned at a speed slow enough to be unlimited by a band limitation of an electrical signal path and a secondary signal obtained when a charged particle beam is scanned at a high speed which is limited by the band limitation of the electrical signal path, calculating a degradation function (H-1(s)) between the plurality of secondary signals, and setting an inverse function of the degradation function as a compensation filter; and a function for updating a parameter of the compensation filter to an optimal value as needed or at an arbitrary timing. These functions enable optimal image restoration in the charged particle radiation device even when a detector or an amplifier circuit constituting the electrical signal path deteriorates with age.