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发明名称
洗净液与洗净方法
摘要
本发明在于揭示一种,于曝光装置的光学镜片部分与晶圆载物台上所载置之曝光对象物之间使其充满浸渍液媒介体而进行曝光之浸液式曝光制程中,于曝光后,用以洗净前述曝光装置之洗净液,其系为含有前述浸渍液媒介体与有机溶剂之洗净液,并且揭示使用该洗净液之洗净方法。根据本发明,能够提供在浸液式曝光制程中,可防止从光阻的溶出成分对曝光装置之损伤,废液处理也很简便,且与浸渍液媒介体的取代效率高,对于半导体制造之生产率亦不构成障碍的一种清净性能优越之洗净液以及洗净方法。
申请公布号
TWI368114
申请公布日期
2012.07.11
申请号
TW095140274
申请日期
2006.10.31
申请人
东京应化工业股份有限公司 日本
发明人
越山淳;横谷次朗;平野智之;辻裕光
分类号
G03F7/36;H01L21/027
主分类号
G03F7/36
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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