发明名称 CURABLE COMPOSITION FOR IMPRINTS, PATTERNING METHOD AND PATTERN
摘要 A curable composition for imprints which comprises a polymerizable compound having at least one of a fluorine atom and a silicon atom, a photopolymerization initiator, and a compound having a functional group capable of bonding to a substrate exhibits good patternability in transferring patterns, particularly micropatterns.
申请公布号 KR20120079094(A) 申请公布日期 2012.07.11
申请号 KR20127009292 申请日期 2010.09.29
申请人 FUJIFILM CORPORATION 发明人 KODAMA KUNIHIKO
分类号 H01L21/027 主分类号 H01L21/027
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