发明名称 METHOD AND DEVICE FOR COATING SUBSTRATES FROM THE VAPOR PHASE
摘要 The invention relates to a method for coating substrates (1) with materials to be vaporized in a vacuum coating system, wherein the vaporization material is deposited on the substrate (1) by double vaporization using an intermediate carrier (3), wherein the intermediate carrier (3) is continuously moved. The aim of the invention is to provide an intermediate carrier that ensures the application in a flow-through coating system. This aim is achieved according to the invention by a cylindrical intermediate carrier (3).
申请公布号 EP2473645(A1) 申请公布日期 2012.07.11
申请号 EP20100752782 申请日期 2010.09.06
申请人 VON ARDENNE ANLAGENTECHNIK GMBH 发明人 GROSS, HARALD
分类号 C23C14/12;C23C14/24 主分类号 C23C14/12
代理机构 代理人
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