发明名称 |
Temporary adhesive composition, and method of producing thin wafer |
摘要 |
A temporary adhesive for which temporary adhesion and subsequent detachment are simple. The temporary adhesive composition includes: (A) an organopolysiloxane having a weight-average molecular weight of at least 15,000, obtained by a hydrosilylation reaction between (A1) and (A2) described below, and (B) an organic solvent having a boiling point of not more than 220°C, wherein (A1) is an alkenyl group-containing organopolysiloxane having a weight-average molecular weight exceeding 2,000, comprising 35 to 99 mol% ofT siloxane units and 1 to 25 mol% of M siloxane units, and in which alkenyl groups bonded to silicon atoms represent at least 2 mol% of all the organic groups bonded to silicon atoms, and (A2) is a specific organohydrogenpolysiloxane having at least two silicon atom-bonded hydrogen atoms or a specific hydrosilyl group-containing compound. |
申请公布号 |
EP2475002(A1) |
申请公布日期 |
2012.07.11 |
申请号 |
EP20120000122 |
申请日期 |
2012.01.10 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
FURUYA, MASAHIRO;TAGAMI, SHOHEI;KATO, HIDETO;ITO, HIDEYUKI;YOSHIZAWA, MASAHIRO |
分类号 |
H01L21/683;C09J183/04 |
主分类号 |
H01L21/683 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|