METHOD FOR MANUFACTURING OF PIEZOELECTRIC THIN FILM WITHOUT LEAD

摘要

PURPOSE: A method for manufacturing a piezoelectric thin film without lead is provided to form a BNT or BNT-BA thin film by depositing sol solution including a composition with a chemical formula of (1-x) (Bi0.5Na0.5TiO3) + x (BiAlO3) through spin coating on a substrate. CONSTITUTION: Sol solution includes a composition with a chemical formula of (1-x)(Bi0.5Na0.5TiO3)+x(BiAlO3). A BNT or BNT-NA thin film is formed by depositing sol solution with spin coating on a substrate. 2- methoxyethanol, acetic acid and acetyl acetone are used as a solvent. A deposition process by the spin coating includes a thermal process and crystallization for evaporating a solvent in the sol solution. 10mole% of bismuth is added in the sol solution.