发明名称 |
SYSTEMS AND METHODS FOR DELIVERY OF FLUID-CONTAINING PROCESS MATERIAL COMBINATIONS |
摘要 |
<p>Common sources of different (e.g., concentrated) process materials are controllably supplied to multiple blending manifolds associated with multiple process tools, processing stations, or other points of use, to create an independently controllable process material blend for each tool, station, or point of use. Multi-constituent process materials may be circulated from a supply container through a blending manifold to a return container to ensure homogeneity until immediately prior to blending and use. Such containers may include liner-based containers adapted for pressure dispensation.</p> |
申请公布号 |
EP2223332(A4) |
申请公布日期 |
2012.07.11 |
申请号 |
EP20080859933 |
申请日期 |
2008.12.08 |
申请人 |
FORESIGHT PROCESSING , LLC |
发明人 |
HUGHES, JOHN, E., Q.;WARE, DONALD, D.;LURCOTT, STEVEN, M.;WRSCHKA, PETER |
分类号 |
H01L21/67;B24B57/02;H01L21/304 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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