| 摘要 |
A radiofrequency plasma generating device, including: a control module generating a control signal at a control frequency, a power supply circuit including a breaker switch controlled by the control signal, the breaker switch applying an excitation signal to an output of the power supply circuit at the control frequency defined by the control signal, a resonator exhibiting a resonant frequency of greater than 1 MHz, connected to the output of the power supply circuit and adapted to generate a voltage for making a spark when it is excited by the excitation signal, and a mechanism monitoring the control module and configured to modify the frequency of the resonator excitation signal in a manner synchronous with the control signal, during application of the excitation signal. |
