METHODS FOR LASER SCRIBING AND BREAKING THIN GLASS

摘要

A method of forming a vent in a glass substrate includes forming a defect in the glass substrate on a scribe line. A beam spot of a laser may be directed onto the defect and advanced along the scribe line. A cooling jet may be directed onto the defect such that the surface of the glass substrate is cooled from a maximum temperature. Thereafter, the cooling spot may be advanced along the scribe line with the beam spot to form the vent in the glass substrate.