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发明名称
摘要
申请公布号
JP4971541(B2)
申请公布日期
2012.07.11
申请号
JP20000567891
申请日期
1999.08.20
申请人
发明人
分类号
H01L21/26;H01L21/677;C23C16/46;C23C16/54;C30B25/10;C30B31/12;H01L21/00;H01L21/205;H01L21/265
主分类号
H01L21/26
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代理人
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地址
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