| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a displacement sensor capable of a stable measurement by performing an automatic set of a measuring region, when an object to be measured has a plurality of surfaces equipped with a different reflectivity like a glass or the like. <P>SOLUTION: The sensor system comprises a light projecting element for the irradiation of a light with specifying angle for the object to be measured, a light-receiving element receiving a reflected light from the object to be measured which is irradiated by the light. The emission light quantity of the light projection element is increased from a specified value gradually with a specified quantity, until the reflected surface over two surfaces of the object to be measured is acquired. The sensor system comprises an automatic setting means of the measuring object region which sets automatically the measuring region for each of the obtained two reflecting surfaces, a displacement-measuring means for measuring the target displacement based on a received image in the light receiving element. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
