发明名称 |
METHOD FOR MANUFACTURING OF PIEZOELECTRIC THIN FILM WITHOUT LEAD |
摘要 |
PURPOSE: A method of manufacturing a piezoelectric thin film without lead is provided to make crystal grow well within a thin film by forming a piezoelectric thin film through a sol-gel method. CONSTITUTION: A method of manufacturing a piezoelectric thin film deposits a sol solution including a composition having the chemical formula of Bi0.5Na0.5Ti1-xMnxO3 on a substrate by spin coating and includes a process of forming a BNTMn-x thin film. A starting material of the sol solution uses bismuth nitrate pentahydrate(Bi(NO3)32O), sodium acetate(CH3COONa), titanium butoxide(Ti(O(CH2)3CH3)4), and manganese acetic(CH3COOMn). A solvent uses 2-methoxyethanol, acetic acid, and acetyl acetone. A deposition process through the spin coating includes a thermal process for thermal processing and crystallization for evaporating the solvent within the sol solution. |
申请公布号 |
KR20120078912(A) |
申请公布日期 |
2012.07.11 |
申请号 |
KR20110000213 |
申请日期 |
2011.01.03 |
申请人 |
UNIVERSITY OF ULSAN FOUNDATION FOR INDUSTRY COOPERATION |
发明人 |
KIM, ILL WON;AHN, CHANG WON;WON, SUNG SIK;JANG, KI BONG;CHAE, SONG A;LEE, SAMMY;CHOI, HAE YOON |
分类号 |
H03H9/17;C23C14/06;H01L41/08;H03H3/02 |
主分类号 |
H03H9/17 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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