发明名称 HEATER FOR LINEAR EVAPORATOR
摘要 PURPOSE: A heater for a linear evaporation source is provided to prevent clogging by supplying enough heat to an evaporative material passing through the jetting unit of an evaporation source. CONSTITUTION: A heater for a linear evaporation source comprises a top heater(200) and fixing support rods(300). The top heater is formed by piling up multiple wire-type heating lines to be adjacent to each other. Each wire-type heating line enclosing a jetting unit of an evaporation source is wound in a loop shape. The fixing support rods bypass the wire-type heating lines in a bubble shape to prevent the wire-type heating lines from becoming separated from the outer wall surface of the jetting unit of the evaporation source.
申请公布号 KR20120078997(A) 申请公布日期 2012.07.11
申请号 KR20110042233 申请日期 2011.05.04
申请人 YAS CO., LTD. 发明人 JEONG, KWANG HO;KIM, SEONG MOON;LEE, TAEK GI;CHI, DAE JOON;JUNG, EUN SANG;KANG, IL SUK
分类号 C23C14/26 主分类号 C23C14/26
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