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发明名称
Method for forming strained semiconductor channel and semiconductor device
摘要
申请公布号
GB2487113(A)
申请公布日期
2012.07.11
申请号
GB20110021729
申请日期
2010.09.19
申请人
INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES
发明人
HAIZHOU YIN;HUILONG ZHU;ZHIJIONG LUO
分类号
H01L29/78;H01L21/8234;H01L21/8238;H01L29/66
主分类号
H01L29/78
代理机构
代理人
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