| 摘要 |
<p>The invention relates to a particle beam processing device having a particle beam generator (7), a vacuum chamber (101) comprising a chamber volume (V) that can be evacuated, wherein the vacuum chamber (101) has a chamber wall (1) with a first opening (O1) which is designed in the chamber wall (1). Said device also has a first cover (2) which is adapted to cover the first opening (O1) and to be rotated about a first rotational axis (C1) passing through the first opening (O1), and a second opening (O2) which is designed in the first cover (2). Said device also has a second cover (3) which is adapted to cover the second opening (O2) and to be rotated about a second rotational axis (C2) passing through the second opening (O2) and move the particle beam generator (7). The particle beam generator (7) can be driven in a first direction (Z) in the chamber volume (V) that can be evacuated.</p> |
