发明名称 MEMS vascular sensor
摘要 A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the substrate, and a heat sensing element disposed on the front-side surface of the substrate and on top of the cavity and the diaphragm. The heat sensing element is electrically couplable to electrode leads formed on the backside surface of the substrate. The sensor includes an electronic system connected to the backside surface and configured to measure a change in heat convection from the sensing element to surrounding fluid when the sensing element is heated by applying an electric current thereto, and further configured to derive from the change in heat convection vascular parameters such as the shear stress of fluid flowing past the sensing element.
申请公布号 US8216434(B2) 申请公布日期 2012.07.10
申请号 US20080041577 申请日期 2008.03.03
申请人 HSIAI TZUNG K.;SOUNDARARAJAN GOPIKRISHNAN;KIM EUN SOK;YU HONGYU;ROUHANIZADEH MAHSA;LIN CHRISTINA TIANTIAN;UNIVERSITY OF SOUTHERN CALIFORNIA 发明人 HSIAI TZUNG K.;SOUNDARARAJAN GOPIKRISHNAN;KIM EUN SOK;YU HONGYU;ROUHANIZADEH MAHSA;LIN CHRISTINA TIANTIAN
分类号 C23C14/34 主分类号 C23C14/34
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