发明名称 |
Lithographic apparatus and device manufacturing method |
摘要 |
A liquid handling system is disclosed in which an extractor to contain liquid in a space between the projection system of a lithographic apparatus and a substrate has, in plan, a shape with a single corner. The extractor is provided in a rotatable part of a liquid handling system. The rotatable part is rotated under the control of a controller. |
申请公布号 |
US8218126(B2) |
申请公布日期 |
2012.07.10 |
申请号 |
US20080314023 |
申请日期 |
2008.12.02 |
申请人 |
STEFFENS KOEN;LIEBREGTS PAULUS MARTINUS MARIA;VAN DER HAM RONALD;DIRECKS DANIEL JOZEF MARIA;BRANDS GERT-JAN GERARDUS JOHANNES THOMAS;ASML NETHERLANDS B.V. |
发明人 |
STEFFENS KOEN;LIEBREGTS PAULUS MARTINUS MARIA;VAN DER HAM RONALD;DIRECKS DANIEL JOZEF MARIA;BRANDS GERT-JAN GERARDUS JOHANNES THOMAS |
分类号 |
G03B27/42 |
主分类号 |
G03B27/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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