发明名称 |
Vertical cavity surface emitting laser and method of manufacturing the same |
摘要 |
A Vertical Cavity Surface Emitting Laser capable of decreasing the lowering of the yield due to displacement and separation of a pedestal without enormous increase of the threshold value and more difficult manufacturing process is provided. A base of a mesa spreads over the top face of a lower DBR layer. The base is a non-flat face in which end faces of a plurality of layers are exposed. The non-flat face is generated due to etching unevenness in forming the mesa, and is in a state of a step in which end faces of a low-refractive index layer and a high-refractive index layer included in the lower DBR layer are alternatively exposed. At least one of the layers exposed in the non-flat face in the plurality of low-refractive index layers included in the lower DBR layer is an oxidation inhibition layer. |
申请公布号 |
US8218596(B2) |
申请公布日期 |
2012.07.10 |
申请号 |
US201113317165 |
申请日期 |
2011.10.12 |
申请人 |
OKI TOMOYUKI;KODA RINTARO;JOGAN NAOKI;MASUI YUJI;ARAKIDA TAKAHIRO;SONY CORPORATION |
发明人 |
OKI TOMOYUKI;KODA RINTARO;JOGAN NAOKI;MASUI YUJI;ARAKIDA TAKAHIRO |
分类号 |
H01S5/00 |
主分类号 |
H01S5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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