| 摘要 |
<p>PURPOSE: An auto teaching method of a substrate transfer robot is provided to improve teaching accuracy by automatically calculating a rotation angle of a vision camera(or a teaching jig). CONSTITUTION: An adding part(O') is marked while being spaced from a direction which is parallel to a traveling direction of a substrate transfer robot in a central part(O) of a plate. The control part transfers an arm in order to match the center of a coordinate axis of a vision camera with the central part. The control part obtains video data including a reference line(L) connecting the central part and the adding part with the vision camera. The control part calculates the angle by revolving the reference line according to a preset coordinate axis of the vision camera.</p> |
