发明名称 |
LIFTING DEVICE OF TOP VESSEL FOR POLYCRYSTLINE SILICON INGOT PRODUCING APPARATUS |
摘要 |
PURPOSE: A lifting apparatus of a top bezel for a poly-crystalline silicon ingot manufacturing device is provided to prevent a chamber from being exploded by automatically opening a top vessel from a middle vessel. CONSTITUTION: A driving part(110) is pivotally installed in a middle vessel in a vertical direction. A lifting member(120) is lifted and dropped with the drive of the driving part. A bracket(130) connects the interval between a top vessel and the lifting member. The bracket is separably mounted on a top end portion of the lifting member to be spaced from an upper portion of the middle vessel with pressure if the pressure rises inside the chamber. |
申请公布号 |
KR20120077971(A) |
申请公布日期 |
2012.07.10 |
申请号 |
KR20100140113 |
申请日期 |
2010.12.31 |
申请人 |
SUSUNGTECH CO., LTD. |
发明人 |
LEE, JONG HWA |
分类号 |
C30B28/06;C30B29/06;H01L31/04 |
主分类号 |
C30B28/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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