| 摘要 |
PURPOSE: A coordinate measuring machine and a measurement error compensation method are provided to reduce costs of a measuring machine and obtain optimal metrology performance. CONSTITUTION: A coordinate measuring machine comprises a bed(2) having a horizontal measurement surface, a unit(3), a circular structure, and a plurality of displacement sensors. The unit moves along guides(10,11) being supported by the bed. The circular structure is extended along a peripheral area of the bed and attached in the bed by an attaching member statically confirmed. The displacement sensor is set in between one of the bed and the unit and the circular structure, thereby detecting relative displacement with respect to an initial reference condition.
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