发明名称 |
CYLINDRICAL MAGNETIC LEVITATION STAGE |
摘要 |
<p>PURPOSE: A cylindrical magnetic levitation stage is provided to directly process a pattern of nanometer size on the cylinder surface of large size by actively controlling the location of a cylinder with an error of the nanometer size. CONSTITUTION: A cylinder movable unit is composed of a rotary cylinder movable unit(110b) and a linear transfer cylinder movable unit(110a). A base unit supports the cylinder movable unit which can be rotated without contact. The base unit comprises electromagnet arrangement bodies(122a, 123a, 122b, 123b). A horizontal magnetic levitation auxiliary unit(140) controls the horizontal direction location of a cylinder mold and the cylinder movable unit. The horizontal magnetic levitation auxiliary unit comprises an electromagnet arrangement body(141).</p> |
申请公布号 |
KR20120076805(A) |
申请公布日期 |
2012.07.10 |
申请号 |
KR20100138525 |
申请日期 |
2010.12.30 |
申请人 |
KOREA ELECTROTECHNOLOGY RESEARCH INSTITUTE |
发明人 |
JEON, JEONG WOO;OH, HYEON SEOK;KIM, JONG MOON;KIM, HYEON TAEG;MITICA CARAIANI;LEE, CHANG RIN;CHUNG, SUNG IL |
分类号 |
H01L21/68;H01L21/02;H01L21/027 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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