Optical waveguide substrate with optical fiber fixation groove, process for its production, stamps for use in this production process, and opto-electronic hybrid integrated module including said optical waveguide substrate

摘要

An optical waveguide substrate with an optical fiber fixation groove, including an optical waveguide which contains a lower cladding layer on a base substrate, wherein the lower cladding layer has an optical fiber fixation groove and a core groove, and a weir is provided between the optical fiber fixation groove and the core groove. The optical waveguide substrate with an optical fiber fixation groove is produced by forming a lower cladding layer on a base substrate using a male stamp produced from a female stamp and then successively forming a core layer and an upper cladding layer thereon.