SUSCEPTOR USING LOW THERMAL EXPANSION COMPOSITE MATERIALS AND METHOD FOR MANUFACTURING ESC COMPONENT

摘要

PURPOSE: A susceptor using a low thermal expansion composite material and a method for manufacturing an esc component are provided to improve the durability of a component by minimizing a thermal expansion coefficient difference of a surface insulating layer, a corrosion resistance film, and a dielectric layer. CONSTITUTION: A composite material in which a carbon material is reinforced for a metal base is applied to a semiconductor and a susceptor material for manufacturing a component of a display so that the composite material can be used in a process below 600°C. A base metal is aluminum and aluminum alloy powder. A reinforcement phase of the base metal includes carbon fiber, graphite, carbon, etc as a carbon material. The shape of the base metal is a powder phase and short fiber.