| 摘要 |
PURPOSE: A device for measuring the flatness of a flat substrate is provided to obtain a precious measurement result by excluding factors obstructing a measurement of a flat substrate and to rapidly perform quality management of the flat substrate by rapidly obtaining the measurement result of the flat substrate. CONSTITUTION: A device for measuring the flatness of a flat substrate comprises a stage(110), a contact type LVDT(Linear Variable Differential Transformer) unit(120), a bracket(130), an elevating plate(140), an elevating unit(150), a control unit(160), and a display unit(170). A flat substrate is placed on the stage. The contact type LVDT is downwardly moved to the bottom of the flat substrate on the stage, thereby contacting to the bottom of the flat substrate. The bracket supports the contact type LVDT unit. The elevating plate is installed in the lower part of the bracket, thereby guiding the elevation of the bracket. The elevating unit is installed in the lower part of the elevating plate, thereby moving the elevating plate up and down. The control unit controls the operation of the elevating unit and senses signals of the LVDT unit and converts the sensed signals into a data. The display unit visually displays the data.
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