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发明名称
Method of manufacturing semiconductor device
摘要
申请公布号
KR101161660(B1)
申请公布日期
2012.07.06
申请号
KR20050092102
申请日期
2005.09.30
申请人
发明人
分类号
H01L21/28;H01L21/336
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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