发明名称 VERTICAL VACUUM ISOLATION APPARATUS
摘要 PURPOSE: A vertical vibration blocking device is provided to block vibration between work chambers in which work objects such as panel glasses are handled wherein the work objects vertically move. CONSTITUTION: A housing(1) includes a vertical inlet(13). The vertical inlet vertically forms a long axis. A support panel(2) horizontally moves in front of the housing. A valve plate(3) is mounted on the support panel. The valve plate shields the inlet. A driving unit(4) horizontally moves the support panel. The driving unit includes a side member, an actuator, a link arm, and a driving arm.
申请公布号 KR20120074491(A) 申请公布日期 2012.07.06
申请号 KR20100136346 申请日期 2010.12.28
申请人 LTL., CO., LTD. 发明人 PARK, YOUNG NAM;KIM, HYUN GYUM
分类号 G02F1/13 主分类号 G02F1/13
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