发明名称 FERROELECTRIC MEMORY AND MANUFACTURING METHOD THEREOF, AND MANUFACTURING METHOD OF FERROELECTRIC CAPACITOR
摘要 Provided is a ferroelectric memory including a silicon substrate, a transistor formed on the silicon substrate, and a ferroelectric capacitor formed above the transistor. The ferroelectric capacitor includes a lower electrode, a ferroelectric film formed on the lower electrode, an upper electrode formed on the ferroelectric film, and a metal film formed on the upper electrode.
申请公布号 US2012171783(A1) 申请公布日期 2012.07.05
申请号 US201213412939 申请日期 2012.03.06
申请人 NAGAI KOUICHI;FUJITSU SEMICONDUCTOR LIMITED 发明人 NAGAI KOUICHI
分类号 H01L21/02 主分类号 H01L21/02
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