METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL ELEMENT

摘要

A method for manufacturing an organic EL element which comprises a vapor deposition process wherein an organic layer is formed on an electrode layer-side surface of a base by ejecting a vaporized organic layer-forming material from a nozzle of a vapor deposition source, while supplying and moving the base with the non-electrode-side surface thereof being in contact with the surface of a rotary driven can roll. In the method for manufacturing an organic EL element, a distance measuring unit which is capable of measuring a first distance that is the distance to the base supported by the can roll and a position adjusting unit which is capable of adjusting a second distance that is the distance between the nozzle of the vapor deposition source and the surface of the base are used, and the vapor deposition process is carried out while controlling the second distance to be constant by means of the position adjusting unit based on the measurement results for the first distance by the distance measuring unit.