OPTICAL WAVEGUIDE, METHOD FOR MANUFACTURING THE SAME AND OPTICAL WAVEGUIDE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a new method by which high reliability is obtained in a method for manufacturing an optical waveguide with two or more systems of different optical paths.

SOLUTION: A method for manufacturing an optical waveguide includes processes of: forming a core layer 22a for a first optical path having first optical path length on a first clad layer 20; forming a groove part 22x with an inclined plane S on the end side of the core layer 22a for the first optical path; forming a core layer 22b for a second optical path having second optical path length longer than the first optical path length in a side area of the core layer 22a for the first optical path on the first clad layer 20; forming a groove part 22y with an inclined plane S to be arranged outside the groove part 22x of the core layer 22a for the first optical path on the end side of the core layer 22b for the second optical path; partially forming a light reflective metal layer 30 on the respective inclined planes S of the core layer 22a for the first optical path and the core layer 22b for the second optical path to obtain an optical path conversion mirror M; and forming a second clad layer 24 which covers the core layer 22a for the first optical path and the core layer 22b for the second optical path.

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