| 摘要 |
A method of etching a programmable memory microelectronic device (10) having a substrate covered with at least one of the following layers in succession: a first electrode (2) based on a first metallic element; a layer (4) of chalcogenide doped with a second metallic element; a second electrode (5) based on a third metallic element; a diffusion barrier type electrically-conductive layer (6); and a hard mask (7); is provided. The method includes etching, using an inert gas plasma, at least the hard mask (7), the electrically-conductive layer (6), the second electrode (5) and the chalcogenide layer (4), where the etching step is carried out by cathode sputtering at a temperature strictly less than 150° C., preferably at a temperature of at most 120° C., and particularly preferably at a temperature of at most 100° C. |
