CHARGED PARTICLE BEAM MICROSCOPE WITH DIFFRACTION ABERRATION CORRECTOR APPLIED THERETO

摘要

A diffraction aberration corrector was configured to have a structure of a corrector comprising a multipole of a solenoid coil ring, and a function of adjusting the degree of orthogonality and axial deviation of vector potential with respect to a beam axis, on the basis of the operating principle of diffraction aberration correction, which controls the phase of an electronic beam using the Aharonov-Bohm effect. The diffraction aberration corrector was applied to a charged-particle beam microscope, by installing the diffraction aberration corrector, which induces vector potential having a distribution that intersects at right angles with the beam axis and that is symmetrical within a face orthogonal to the beam axis, near an objective diaphragm and an objective lens, to generate a phase difference. A diffracted wave proceeding in inclination with respect to the beam axis is able to increase, by passing through a magnetic-flux ring, the phase difference within the diameter of the beam with the Aharonov-Bohm effect caused by the vector potential, and the intensity of the electronic beam upon a sample can thereby be inhibited.