| 摘要 |
<p>Provided is a precise air conditioning device which can control the amount of waste heat in response to the air conditioning load of a control target while a constant load of a refrigeration cycle is maintained. The precise air conditioning device of the present invention introduces air in a chamber (12) disposed in a clean room (10) and circulates the air in the chamber (12) at a set temperature, wherein a condenser (31), an expansion valve (35), and an evaporator (26) are sequentially connected from a discharge side to a suction side of a compressor (29). The precise air conditioning device comprises: a refrigeration cycle (25) which includes a hot gas bypass circuit (40) flowing hot gas at the discharge side of the compressor (29) to the evaporator (26); a heat recovery unit (28) which has the evaporator (26) of the refrigeration cycle (25) accommodated therein, and introduces air from the chamber (12) and circulates the air in the chamber (12) by adjusting the air to the set temperature by means of the evaporator (26); and a heat radiating unit (33) which is disposed in the clean room (10) and accommodates the condenser (31) of the refrigeration cycle (25), and includes a variable capacity fan (32) for cooling the condenser (31) with the air in the clean room (10).</p> |
