METHOD FOR THE PLASMA TREATMENT OF WORKPIECES AND WORKPIECE COMPRISING A GAS BARRIER LAYER

摘要

The method serves for the plasma treatment of workpieces. The workpiece is inserted into a chamber of a treatment station that can be at least partially evacuated. The plasma chamber is bounded by a chamber bottom, a chamber top and a lateral chamber wall. The plasma treatment involves depositing a coating on the workpiece. The ignition of the plasma is performed by microwave energy. The coating consists at least of a gas barrier layer and a protective layer. The gas barrier layer contains SiOx and the protective layer contains carbon. The protective layer is produced from a gas that contains at least a silicon compound and argon.