| 摘要 |
PURPOSE: An Injector for a vacuum evaporation apparatus is provided to prevent the stuck of the upper opening of the main channel of a nozzle due to the segment of the upper portion of the nozzle. CONSTITUTION: An Injector for a vacuum evaporation apparatus comprises a suction port(2) and one or more nozzles(3). The nozzle comprises one or more side feeding channels(7) and a main channel(6). The side feeding channels connect the inner portion of the injection duct and the main channel. The side feeding channel comprises a side orifice(8). The side orifice is extended into the inner space of the injection duct. |
