发明名称 THIN FILM TRANSISTOR AND FABRICATING METHOD THEREOF
摘要 A thin film transistor (TFT) including a gate, a gate insulator, an oxide semiconductor channel layer, a source, and a drain is provided. The gate insulator covers the gate, while the oxide semiconductor channel layer is configured on the gate insulator and located above the gate. The oxide semiconductor channel layer includes a first sub-layer and a second sub-layer located on the first sub-layer. An oxygen content of the first sub-layer is lower than an oxygen content of the second sub-layer. The source and the drain are configured on a portion of the second sub-layer. In addition, a fabricating method of the above-mentioned TFT is also provided.
申请公布号 US2012168743(A1) 申请公布日期 2012.07.05
申请号 US201113097082 申请日期 2011.04.29
申请人 LEE LIU-CHUNG;TING HUNG-CHE;CHEN CHIA-YU;AU OPTRONICS CORPORATION 发明人 LEE LIU-CHUNG;TING HUNG-CHE;CHEN CHIA-YU
分类号 H01L29/12;H01L21/336 主分类号 H01L29/12
代理机构 代理人
主权项
地址