LASER PROCESSING APPARATUS

摘要

The present invention relates to a laser processing apparatus including: a laser beam source for generating a laser beam; and an optical unit for inducing the laser beam to an inside of an object, wherein the optical unit includes: a beam shaping module for correcting the divergence angle of the laser beam; a diffraction grating for diffracting the laser beam; and a focusing lens for forming a spot by focusing the laser beam to the inside of the object.