<p>Disclosed are a backside registration apparatus and a method for determining the relative location relationship between a base (6) and a work station (24). The backside registration apparatus comprises an illumination apparatus (1) for emitting infrared light; a work station apparatus (2) for supporting and moving the base (6); an imaging apparatus (3) for probing an registration mark and calculating the position of the registration mark, wherein the registration mark comprises a fiduciary mark (41) and a backside registration mark (20); and a fiduciary apparatus (4) for establishing a locational coordinate relationship between the imaging apparatus (3) and the work station apparatus (2). The illumination apparatus (1) and the imaging apparatus (3) are capable of illuminating and registering different registration marks using one device.</p>
