ADSORPTION CELL, AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an adsorption cell capable of preventing the occurrence of fine dust particles and preventing secondary contamination.

SOLUTION: The adsorption cell includes a first adsorption layer 110 formed of a first adsorbing agent, and a second adsorption layer 120 formed of a second adsorbing agent higher in density than the first adsorbing agent and coated on the surface of the first adsorption layer to prevent the occurrence of dust particles from the first adsorption layer. The adsorption cell is obtained by coating the second adsorption layer formed of the high density adsorbing agent on the upper surface of the first adsorption layer.

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