| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wafer conveying case which surely absorbs impact such as a vibration to surely protect a wafer when conveyed and which facilitates the work of loading/unloading the wafer therein/therefrom. <P>SOLUTION: A case body 1 is configured in such a way that a lower lid member 11 and an upper lid member 12 can be freely opened/closed. Three three-point supporting projections 2 at least one of which is different in height are arranged in a projected fashion on the inside surface of the lower lid member 11, the surface of the wafer W is abutted on the three tops of these three-point supporting projections 2, so that the wafer can be placed thereon. Meanwhile, a restrictive convex part 3 is arranged in a projected fashion on the inside surface of the upper lid member 12, and when the case body 1 is closed, the top of the restrictive convex part 3 is arranged on the upper surface of the wafer W or the vicinity thereof to restrict the floating of the wafer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
