发明名称 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A nonvolatile semiconductor memory device including a memory cell configured to store data and a resistor element provided around the memory cell. The memory cell includes a charge storage layer provided above a substrate, a first semiconductor layer formed on a top surface of the charge storage layer via an insulating layer, and a first low resistive layer formed on a top surface of the first semiconductor layer and having resistance lower than that of the first semiconductor layer. The resistor element includes a second semiconductor layer formed on the same layer as the first semiconductor layer, and a second low resistive layer formed on the same layer as the first low resistive layer and on a top surface of the second semiconductor layer, having resistance lower than that of the second semiconductor layer.
申请公布号 US2012168851(A1) 申请公布日期 2012.07.05
申请号 US201213344765 申请日期 2012.01.06
申请人 FUKUDA KOICHI;TANAKA RIEKO;ABE TAKUMI;KABUSHIKI KAISHA TOSHIBA 发明人 FUKUDA KOICHI;TANAKA RIEKO;ABE TAKUMI
分类号 H01L27/088 主分类号 H01L27/088
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