SU-8 MICRONEEDLES FOR MONITORING AND STIMULATING NEURONS

摘要

An SU-8 microneedle for monitoring and stimulating neurons, has a thickness less than 100 micrometers and a length of 50 micrometers to 10 centimeters. A manufacturing method allows removing the microneedle from the substrate without using mechanical devices due to the initial coating of a rigid substrate with an aluminium layer as a sacrificial layer and the final chemical etching of the aluminium layer for chemically removing the microneedle obtained in known intermediate photolithographic manufacturing steps.