发明名称 |
SYSTEM AND METHOD FOR GAS LEAK CONTROL IN A SUBSTRATE HOLDER |
摘要 |
An electrostatic clamp includes a heating block for heating a substrate, the heating block having a first surface disposed toward the substrate and a second surface opposite the first surface. A base is arranged to adjoin at least a portion of the second surface of the heating block. The adjoined base and heating block may mutually define an inner gap between a first portion of the heating block and the base. An outer gap is arranged concentric with the inner gap between a second portion of the heating block and the base, the inner and outer gaps being isolated from one another by a first sealing surface formed between the second surface of the heating block and the base.
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申请公布号 |
US2012168640(A1) |
申请公布日期 |
2012.07.05 |
申请号 |
US20110983710 |
申请日期 |
2011.01.03 |
申请人 |
MILLER TIMOTHY J.;MUKA RICHARD S.;BLAKE JULIAN G.;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
MILLER TIMOTHY J.;MUKA RICHARD S.;BLAKE JULIAN G. |
分类号 |
H01L21/425;G01N23/00;H01L21/683 |
主分类号 |
H01L21/425 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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