POLYPEPTIDE FOR DISTINGUISHING SILICON OXIDE FROM SILICON NITRIDE, AND USE THEREOF

摘要

The present invention provides a technique by which it is possible to distinguish a silicon oxide from a silicon nitride. More specifically, the present invention provides a first polypeptide which bonds specifically to silicon oxide and does not bond to silicon nitride, and/or provides a second polypeptide which bonds specifically to silicon nitride and does not bond to silicon oxide. Further provided is a composition that contains the first polypeptide and/or the second polypeptide. Furthermore, the present invention provides a substrate having a surface that bonds to the first polypeptide and/or the second polypeptide, and a semiconductor device provided with the substrate.