SHIELDING LOCAL PRINTING APPARATUS AND METHOD THEREOF

摘要

PURPOSE: An apparatus and method for printing a local area are provided to display a defective position by forming a pattern around a defect of a substrate. CONSTITUTION: A substrate transfer unit(10) comprises a frame(11), a flat table(12), and a stage(13) which supports a substrate. An optical microscope(20) checks defects and patterns formed on all area of the substrate and includes a body unit(21), an object lens(22), and an eyepiece(23). A pattern transfer unit(30) is installed near the optical microscope. The pattern transfer unit includes a dispenser, a blade, and a driving unit.