| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high efficiency electrostatic chuck assembly including a flex stack having an electrode disposed between two dielectric layers. <P>SOLUTION: At least one dielectric layer is a standard or high purity thermoplastic film. A flex stack 112 may have a matte finish on a substrate support surface 132 of a first dielectric layer 124 to provide benefits such as improved temperature distribution across the surface of the electrostatic chuck. A non-substrate support surface or pedestal receiving side of the flex stack may be plasma-treated to provide a desired surface finish, which is then bonded to a pedestal using an acrylic or epoxy adhesive resulting in superior bonding strength compared to traditional polymer electrostatic chucks. An electrode 122 may be a sheet electrode on a release liner, which enables ease of manufacturing. <P>COPYRIGHT: (C)2012,JPO&INPIT |
