发明名称 SEMICONDUCTOR DEVICE HAVING A COPPER PLUG
摘要 Disclosed is a process of making a semiconductor device wherein an insulation layer has a copper plug in contact with the last wiring layer of the device. There may also be a barrier layer separating the copper plug from the insulation layer. There may also be a cap layer over the copper plug to protect it from oxidation. There may also be a dielectric layer over the cap layer.
申请公布号 US2012168952(A1) 申请公布日期 2012.07.05
申请号 US201213418261 申请日期 2012.03.12
申请人 FAROOQ MUKTA G.;KINSER EMILY R.;MELVILLE IAN D.;SEMKOW KRYSTYNA W.;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 FAROOQ MUKTA G.;KINSER EMILY R.;MELVILLE IAN D.;SEMKOW KRYSTYNA W.
分类号 H01L23/522;H01L21/768 主分类号 H01L23/522
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