ELECTRONIC DEVICES INCLUDING GRAPHENE AND METHODS OF FORMING THE SAME

摘要

Methods of forming a graphene layer are provided. The method includes sequentially forming a seed layer and a protection layer on a substrate, patterning the protection layer and the seed layer to form a protection pattern and a seed pattern having a first length in a first direction and a second length in a second direction perpendicular to the first direction, and forming a graphene material on at least one of both sidewalls of the seed pattern. The second length is greater than the first length. Related devices are also provided.